Research in the Centre for Non-equilibrium Processes is oriented to the studies of the non-equilibrium plasmas and its application in Nano-technologies, etching of intergrated circuits and environmental research. They are related to:

  • studies motivated by the development of 40 nm technologies for integrated circuits related to plasma and fast neutral etching;
  • interaction of nonequilibrium plasmas with surfaces to achieve nanostructured hydrophobic surfaces and treatment of biological materials;
  • growth and control of nanotubes on surfaces and nano particles in gas phase and
  • suspended particles as atmospheric pollutants.