Laboratory for Gaseous Electronics

EQP – Mass and Energy Analyzer for Plasma Diagnostics and Langmuir probeHiden Analytical, Great Britain  
Laser system: Nd:YAG and NarrowScan D-R laser Radiant Dyes Laser & Accessories GmbH, Germany– NarrowScan D-R laser, 2×90 mm grid, 2400 l/mm, temp. stabilization, two layer optics; 355 nm and 532 nm
– Innolas Spitlight 1200-10 – Nd:YAG laser – wavelength 1064, 532, 355, 266 nm, power 20–1000 mJ
 
GEC plasma reactorHuntington, USAReactor for plasma etching and rf plasma optimisation. The reactor is standardized GEC cell vacuum chamber with ICP and movable CCP electrodes.  
CSA Spectrum Analyzer
Synthesized RF signal generator
DSO6052A OscilloscopeAgilent Technologies, USA– CSA Spectrum Analyzer 100 kHz – 3 GHz
– Synthesized RF signal generator 9 kHz – 2 GHz
– DSO6052A Oscilloscope 2 channels, 500 MHz
 
Barthel RFA0.1/50-100 (version B00)
pulse power amplifier
Barthel HF Technik, Germany– Frequency range 0.1-50 MHz
– Power > 100W (CW)
– Amplification 50-56 dB
 
TSU 521/Duo 10M Turbo CubePfeiffer Vacuum, Germany (SCAN, Slovenia)– Pumping speed for N2 500 l/s
– Pumping speed of mechanical pump: 3.3 m3/h
– Minimum pressure: 1×10-8 mbar
 
ATP 400C Turbomolecular Pumping SystemAdixen, Alcatel Vacuum Technology2 stages, nominal flow rate 15 m3/h,
ultimate pressure 3×10-1 Pa
 
Swarm experimentselfmadeSwarm experiment for measurement of excitation coefficients in various gases  
Breakdown/Pulsed glow discharge experimentselfmadeExperiment for determination of electrical and optical characteristic of low-pressure dc discharges  
ALCATEL 120 Turbomolecular Pumping SystemAdixen, Alcatel Vacuum Technology2 stages, nominal flow rate 15 m3/h, ultimate pressure 3×10-1 Pa  
Signal generatorAgilent N9310AAccurate CW, analog modulated (AM, FM, ΦM) and pulse modulated signals, 9 kHz to 3 GHz with 0.1 Hz resolution, SSB <-95 dBc/Hz  
OscilloscopeAgilent Oscilloscope DSO6052A500 MHz Bandwidth, 2 analog channels, 4 GSa/s sample rate  
Pulse/Delay GeneratorBNC Model 555 Pulse/Delay GeneratorDelay: 0 to 99.999999999
Pulse Width: 10 ns to 99.999999999
Delay Resolution: 1 ns
 
Langmuir probeHiden ESPion15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analyses.
Passive RF compensation with blocking impedance of 4.25 MOhm at 13.56 MHz cf. 100kOhm.
 
Power Generator + match boxDressler Cesar RF Power Generator 1310Frequency:13.560 MHz
RF power:0 – 1000 W
Reflected power max: 40% of Pmax.
Impedance:50 Ohms
 
ICCD CameraAndor iStar 734 ICCD CameraActive Area (mm): 13.3 x 13.3 (18mm tube) or 20 x 20 (25mm tube)
Active Pixels: 1024 x 1024
Pixel Size (µm): 13 (18mm tube) or 19.5 (25mm tube)
Spectral Range (nm): 115 – 920
 
Function GeneratorPeakTech DDS Function Generator 4025high frequency accuracy: up to 10-5
high frequency resolution: 20 mHz
high waveform accuracy: 16 types of waveforms
 
Big plasma chamber13.56 MHz capacitively coupled low pressure large scale glow discharge chamber  
Small plasma chamber13.56 MHz capacitively coupled low pressure glow discharge chamber suitable for treatment of seeds and textile  
System for plasma jetFrequency 25-125 kHz
Voltage up to 12 KV p-p
Flow of helium up to 7 slm
 
System for plasma needleFrequency 13.56 MHz
Flow of helium up to 7 slm
 

 

HI CUBE Classic pumping stationScanPumping speed: 685 1/s
Ultimate pressure < 5×10-10 mbar
 
Oscilloscope DSO6104AAgilent1 GHz Bandwidth
4 analog channels
4 GSa/s sample rate
 
Oscilloscope DSO6054AAgilent500 MHz Bandwidth
4 analog channels
4 GSa/s sample rate
 
Oscilloscope TDS5104BTektronix4 independent 1 GHz Channels
5 GS/s Maximum Real-time Sample Rate
100,000 wfms/s Maximum Waveform Capture Rate
 
Probe Dependent TCP312TektronixAC/DC Measurement Capabilities
DC – 100 MHz, Current Probe Amplifier
DC – 100 MHz, 30 A DC
 
Current Probe TCP0030TektronixDC to >120 MHz Bandwidth
30 A RMS Maximum Current Capability
50 A Peak Pulse Current Capability
 
High-voltage Differential Probes P5210TektronixBandwidths up to 100 MHz
Up to 5,600 V Differential (DC + pk AC)
Up to 2,200 V Common (RMS)